A review of subsurface damage detection methods for optical components

Subsurface damage (SSD) induced during the processing of optical components, which are key parts large systems, can deteriorate system performance or complete system. To eliminate SSD components in subsequent processing, it must be accurately detected. This paper presents a review principle, characteristics, research status, and development trends detection methods for components. finds that destructive cannot detect online, but they reliable accurate characterized by facile principles, easy implementation, inexpensive equipment. Consequently, such widely used validation non-destructive quality control industrial production. In comparison, online without destroying shorten cycle, increase overall production efficiency, decrease cost. Therefore, have promising prospects.